王喆垚
Wang Zheyao

 

 

 

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王喆垚，男，1972年出生于内蒙古，1990考入清华大学精密仪器系，1995年获学士学位。同年免试进入清华大学精密仪器系攻读博士学位，2000年获机械电子学专业工学博士学位。2000-2002年在清华大学微电子学研究所从事博士后研究，2002-2003年在荷兰Delft University of Technology微电子与亚微米技术研究所（Delft Institute of Microelectronics and Submicron Technology, DIMES）从事博士后研究，2003年底回国工作。2003年底任副教授，2008年底晋升为教授。先后从事RF MEMS、高频硅微加工器件，以及BioMEMS的研究。

通信地址：北京清华大学微电子学研究所
邮编：100084
电话：010-62789151-322
传真：010-62771130
电子邮件：z.wang@mail.tsinghua.edu.cn
http://main.ime.tsinghua.edu.cn

目前主要研究方向：

1. BioMEMS及生物医学传感器
  [1]. 蛋白检测传感器阵列和重大疾病早期诊断芯片
  [2]. 微流体与芯片实验室（ Lab-on-a-chip ）
2. 三维集成芯片系统（SOC）
  [1]. CMOS兼容三维集成技术
  [2]. 三维铜互连技术
3. 微/纳电子机械系统及微纳传感器
  [1]. 微纳米传感器
  [2]. 集成传感器阵列

    授权中国发明专利3项，公开专利6项，获得北京市科技进步二等奖1项（5/9），清华大学科技成果推广三等奖1项（5/5）。2005年入选北京市“科技新星计划”，入选2005年教育部“新世纪优秀人才支持计划”。目前负责国家自然科学基金（面上）、973子课题、863探索导向型项目，以及Intel和ABB公司国际合作项目。现为中国仪器仪表学会传感器分会理事，IEEE会员，IEEE Sensors Journal，IEEE Trans. Ultrasonic Ferroelectrics and Frequency Control，Microelectronics Reliability, Sensors and Actuators A/B等期刊应邀审稿人，IEEE Sensors Conference 2008及 2009 技术委员会委员。发表国际期刊和会议论文45篇。

专著：

1. 仪器制造技术，曲兴华 胡鹏浩 贾果欣 郭敬滨 赵博雷 贾维傅 王平 王喆垚，73/562千字，机械工业出版社，ISBN7-111-15754-0，2005.1
2.  微系统设计与制造，王喆垚 清华大学出版社 2008.2，1036千字 ISBN 978-7-302-15196-8

国际期刊论文：

  • [1] Qianwen Chen, Zheyao Wang*, Litian Liu. The Influence of ultrasonic agitation on copper electroplating of blind-vias for SOI three-dimensional integration. Microelectronics Engineering, Accepted.
  • [2] Chongshen Song, Zheyao Wang*, Litian Liu. Bottom-up copper electroplating using transfer wafers for fabrication of high aspect-ratio through-silicon-vias. Microelectronics Engineering, Accepted.
  • [3] Kuo Tian, Zheyao Wang*, Min Zhang, Litian Liu. Design, fabrication, and calibration of a piezoresistive stress sensor on SOI wafers for electronic packaging applications. IEEE Trans. Components and Packaging Technologies. 32(7): 513-520, 2009.
  • [4] Youzheng Zhou, Zheyao Wang*, Chaonan Wang, Wenzhou Ruan, Litian Liu. Design, fabrication, and characterization of a two-step released silicon dioxide piezoresistive microcantilever immunosensor, Journal of Micromechanics and Microengineering , 19, 065026, 2009
  • [5] Zheyao Wang*, Youzheng Zhou, Chaonan Wang, Wenzhou Ruan, Litian Liu. A Theoretical model for surface-stress piezoresistive microcantilever biosensors with discontinuous layers. Sensors Actuators B: Chemical, 138: 598-606, 2009.
  • [6] Youzheng Zhou, Zheyao Wang*, Qi Zhang, Wenzhou Ruan, Litian Liu. A front-side released single crystalline silicon piezoresistive microcantilever sensor. IEEE Sensors Journal. 9(3)：246-254, 2009.
  • [7] Chongshen Song, Zheyao Wang*, Qianwen Chen, Jian Cai, Litian Liu. High aspect ratio copper through-silicon-vias for 3D integration. Microelectronic Engineering, 2008, 85: 1952-1956
  • [8] Zheyao Wang*, Kuo Tian, Youzheng Zhou, Liyang Pan, Chaohong Hu, Litian Liu. A high temperature silicon-on-insulator stress sensor. Journal of Micromechanics and Microengineering. 18(4), 045018, 2008.
  • [9] Chao Wang, Zheyao Wang*, Tianling Ren, Yiping Zhu, Yi Yang, Xiaoming Wu, Haining Wang, Hujun Fang, Litian Liu. A micromachined piezoelectric ultrasonic transducer operating in d33 mode using square interdigital electrodes. IEEE Sensors Journal, 7(7): 967-976, 2007.
  • [10] Wang C, Ren TL, Wang ZY, et al. Fabrication and characterization of in-plane polarized PZT films with interdigital electrodes. Integrated Ferroelectrics, 88: 3-11 2007.
  • [11] Chao Wang, Zheyao Wang*, Tianling Ren, Litian Liu. Design and Simulation of a Novel Operation Mode of Integrated Ferroelectric Micro-Sensors, Integrated Ferroelectrics, 78: 59-67, 2006.
  • [12] Xuefeng Zeng, Ruifeng Yue, Jiangang Wu, Huan Hu, Liang Dong, Zheyao Wang, Feng He, Litian Liu. Droplet creator based on electrowetting-on-dielectric for lab on a chip. Science in China Series E: Tech Sciences, 49 (2): 248-256 APR 2006.
  • [13] Wu Jiangang, Yue RF, Zeng Xuefeng, Kang Ming, Hu Huan, Zheyao Wang, Liu Litian. Studies on digital microfluidic chip for micro-total-analysis systems.Chinese Journal of Analytical Chemistry, 34 (7): 1042-1046 JUL 2006.
  • [14] Zheyao Wang*, Huan Hu, Yu Wang, Yawu Wang, Qiong Wu, Litian Liu, Guoqiang Chen, Soft lithography techniques for the fabrication of poly(3-hydroxybutyrate-co-3-hydroxyhexanoate) scaffolds, Biomaterials, 27(12), Apr.2006, 2550-2557.
  • [15] Zheyao Wang*, Jianshe Liu, Litian Liu, Zhijian Li, Permittivity Measurement of Ba0.5Sr0.5TiO3 Thin Films on Multi-Layered Silicon Substrates, IEEE Trans. Instrumentation and Measurement. 55(1), 2006, 350-356.
  • [16] Zheyao Wang, Lianwei Wang, N. T. Nguyen, Wim A.H. Wien, Hugo Schellevis, Pasqualina M. Sarro, Joachim N. Burghartz. Silicon Micromachining of High-Aspect Ratio, High-Density Through-Wafer Electrical Interconnects for 3D Multichip Packaging, IEEE Trans. on Advanced Packaging, 29(3), 615-622, 2006.
  • [17] Jiashi Yang, Honggang Zhou, Zheyao Wang, Vibrations of an Asymmetrically Electroded Piezoelectric Plate, IEEE Trans. on Ultrasononics, Ferroelectrics, and Frequency Control. 52(11), 2031-2038, 2005.
  • [18] Zheyao Wang, Chao Wang, Litian Liu, Design and Analysis of A PZT-Based Micromachined Acoustic Sensor with Increased Sensitivity, IEEE Trans. on Ultrasononics, Ferroelectrics, and Frequency Control, 52(10), Oct, 2005, 1840-1850.
  • [19] Zheyao Wang, Huan HU, Analysis and Optimization of a Compliant Mechanism-Based Digital Force/Weight Sensor?IEEE Sensors Journal, 5(6), Dec. 2005, 1243 – 1250.
  • [20] Zheyao Wang, Ruifeng Yue, Ruoxin Zhang, Litian Liu, Design and optimization of laminated piezoresistive microcantilever sensors, Sensors and Actuators. A, 120(2), 2005: 325-336.
  • [21] Zheyao Wang, Jianshe Liu, Tianling Ren, Litian Liu, Fabrication of organic PVP doping-based Ba0.5Sr0.5TiO3 thick films on silicon substrates for MEMS applications, Sensors and Actuators. A, 2005, 117(2): 293-300.
  • [22] Zheyao Wang, etc, Creep characteristics of combined bulk acoustic wave quartz resonator force sensors, Sensors and Actuators. A, 2004,Mar 111(2-3): 203-209.
  • [23] Zheyao Wang, etc, Effect of Transverse Loading on Performance of BAW Quartz Resonator Force Sensors, IEEE Trans. on Ultrasononics, Ferroelectrics, and Frequency Control, 2004, 51(4): 470-476.
  • [24] Zheyao Wang, etc, Development of a High Resolution Quartz Resonator Force and Weight Sensor with Increased Reliability, IEEE Trans. on Mechatronics, 9 (2): 399-406, 2004.
  • [25] Zheyao Wang, etc. A thickness-shear quartz resonator force sensor with dual-mode temperature compensation, IEEE Sensors Journal. 2003, 3 (4): 490-496.
  • [26] Zheyao Wang, etc, Force-frequency coefficient of symmetrical incomplete circular quartz crystal resonator, IEEE Trans. on Ultrasononics, Ferroelectrics, and Frequency Control, 2001, 48(5), 1471-1479.
  • [27] Zheyao Wang, etc, An off-center load insensitive digital quartz resonator force sensor based on energy trapping effect, IEE Proceeding Science Measurement Technology, 2001, 148(5), 215-220.
  • [28] Zheyao Wang, etc, A temperature insensitive quartz resonator force sensor, Measurement Science and Technology, 2000, 11(11), 1565-1569.

国际会议论文：

  • [1] Youzheng Zhou, Zheyao Wang, Wentao Yue, Kai Tang, and Litian Liu. Label-free Detection of p53 Antibody Using A Microcantilever Biosensor With Piezoresistive Readout. IEEE Sensors Conference, 2009.
  • [2] Qianwen Chen, Zheyao Wang, Litian Liu. The Influence of Ultrasonic Agitation on Copper Electroplating of Blind-Vias for SOI Three-Dimensional Integration. 2009 15th Materials for Advanced Metallization, Accepted.
  • [3] Chongshen Song, Zheyao Wang*, Litian Liu. Bottom-up copper electroplating using transfer wafers for fabrication of high aspect-ratio through-silicon-vias. 2009 15th Materials for Advanced Metallization, Accepted.
  • [4] Youzheng Zhou, Qi Zhang, Zheyao Wang, Litian Liu. A Silicon Microcantilever Biosensor Fabricated on SOI Wafers Using a Two-Step Releasing Approach. IEEE Sensors Conference, 2008, 227-230.
  • [5] Chongshen Song, Zheyao Wang, Qianwen Chen, Jian Cai, Litian Liu. High aspect ratio copper through- silicon- vias for 3D integration. 2008 14th Materials for Advanced Metallization,
  • [6] Zhu, Yi-Ping; Ren, Tian-Ling; Wang, Chao; Wang, Zhe-Yao; Liu, Li-Tian; Li, Zhi-Jian;Novel In-Plane Polarized PZT Film Based Ultrasonic Micro-Acoustic Device. International Solid-State Sensors, Actuators and Microsystems Conference, 2007. TRANSDUCERS 2007.10-14 June 2007:1291 – 1294 (SCI: BGP86)
  • [7] Wang, Jinpeng; Hu, Huan; Wang, Zheyao; Liu, Litian; Numerical Analysis and Optimization of Insulator-based Dielectrophoresis Devices for Cell Sorter Applications. 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, 2007. NEMS '07. Jan. 2007:1048 – 1051(SCI: BGN46)
  • [8] Huan Hu; Zhe-yao Wang; Rui-feng Yue; Li-tian Liu;Design and Optimization of a Microfluidic Cell Separator Based on Dielectrophoresis. 1st IEEE International Conference on Nano/Micro Engineered and Molecular Systems, 2006. NEMS '06. 18-21 Jan. 2006:1113 – 1116 (SCI: BGM58)
  • [9] Zheyao Wang; Jianshe Liu; Tianling Ren; Litian Liu; Zhijian Li; Ba/sub 0.5/Sr/sub 0.5/TiO/sub 3/ ferroelectric thick films with uniform thickness and its applications to RF MEMS devices, Proceedings of the 13th IEEE International Symposium on Applications of Ferroelectrics, ISAF 2002. 28 May-1 June 2002, 475 – 478.