 王喆垚
Wang Zheyao
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Zheyao Wang, was born in China
in 1972. He received the B.S. degree in mechanical engineering
in 1995, and the Ph.D. degree in mechatronics in 2000, both
from Tsinghua University, Beijing, China.
From 1994 to 2000, he was with the Dept. Precision
Instruments, Tsinghua University, where he developed digital
force sensors. From 2000 to 2002, he was a postdoctoral research
fellow in the Institute of Microelectronics of Tsinghua University,
Beijing, China, where he worked on silicon micromachining for
RF applications with a special focus on microstrip lines on
silicon substrates. In 2002, he joined DIMES, Delft University
of Technology, Delft, the Netherlands, as a postdoctoral researcher,
and worked on silicon micromachined structures and components
for 3D packaging and RF applications, in particular silicon
micromachined through-wafer electrical interconnect vias. He
currently is an associate professor in Tsinghua University,
Beijing, China. His research interests include silicon micromachining
techniques, MEMS, and biosensors.
[1]. ChaoWang, ZheyaoWang, Tianling Ren,
Litian Liu. Design and Simulation of a Novel Operation Mode
of Integrated Ferroelectric Micro-Sensors, Integrated Ferroelectrics,
78: 59-67, 2006
[2]. Xuefeng Zeng, Ruifeng Yue, Jiangang Wu, Huan Hu, Liang
Dong, Zheyao Wang, Feng He, Litian Liu. Droplet creator based
on electrowetting-on-dielectric for lab on a chip. Science in
China Series E: Tech Sciences, 49 (2): 248-256 APR 2006
[3]. Zheyao Wang, Huan Hu, Yu Wang, Yawu Wang, Qiong Wu, Litian
Liu, Guoqiang Chen, Soft lithography techniques for the fabrication
of poly(3-hydroxybutyrate-co-3-hydroxyhexanoate) scaffolds,
Biomaterials, 27(12), Apr.2006, 2550-2557.
[4]. Huan Hu, Zheyao Wang, Ruifeng Yue, Litian Liu, Design and
optimization of a dielectrophoretic cell separator for microfluidic
applications, IEEE Review on Micro and Nano Systems, Accepted.
[5]. Zheyao Wang, Jianshe Liu, Litian Liu, Zhijian Li, Permittivity
Measurement of Ba0.5Sr0.5TiO3 Thin Films on Multi-Layered Silicon
Substrates, IEEE Trans. Instrumentation and Measurement. 55(1),
2006, 350-356.
[6]. Zheyao Wang, Lianwei Wang, N. T. Nguyen, Wim A.H. Wien,
Hugo Schellevis, Pasqualina M. Sarro, Joachim N. Burghartz.
Silicon Micromachining of High-Aspect Ratio, High-Density Through-Wafer
Electrical Interconnects for 3D Multichip Packaging, IEEE Trans.
on Advanced Packaging, 29(3), 615-622, 2006
[7]. Jiashi Yang, Honggang Zhou, Zheyao Wang, Vibrations of
an Asymmetrically Electroded Piezoelectric Plate, IEEE Trans.
on Ultrasononics, Ferroelectrics, and Frequency Control. 52(11),
2031-2038, 2005.
[8]. Zheyao Wang, Chao Wang, Litian Liu, Design and Analysis
of A PZT-Based Micromachined Acoustic Sensor with Increased
Sensitivity, IEEE Trans. on Ultrasononics, Ferroelectrics, and
Frequency Control, 52(10), Oct, 2005, 1840-1850.
[9]. Zheyao Wang, Huan HU, Analysis and Optimization of a Compliant
Mechanism-Based Digital Force/Weight Sensor? IEEE Sensors Journal,
5(6), Dec. 2005, 1243 – 1250.
[10]. Zheyao Wang, Ruifeng Yue, Ruoxin Zhang, Litian Liu, Design
and optimization of laminated piezoresistive microcantilever
sensors, Sensors and Actuators. A, 120(2), 2005: 325-336.
[11]. Zheyao Wang, Jianshe Liu, Tianling Ren, Litian Liu, Fabrication
of organic PVP doping-based Ba0.5Sr0.5TiO3 thick films on silicon
substrates for MEMS applications, Sensors and Actuators. A,
2005, 117(2): 293-300.
[12]. Zheyao Wang, etc, Creep characteristics of combined bulk
acoustic wave quartz resonator force sensors, Sensors and Actuators.
A, 2004,Mar 111(2-3): 203-209.
[13]. Zheyao Wang, etc, Effect of Transverse Loading on Performance
of BAW Quartz Resonator Force Sensors, IEEE Trans. on Ultrasononics,
Ferroelectrics, and Frequency Control, 2004, 51(4): 470-476.
[14]. Zheyao Wang, etc, Development of a High Resolution Quartz
Resonator Force and Weight Sensor with Increased Reliability,
IEEE Trans. on Mechatronics, 9 (2): 399-406, 2004.
[15]. Zheyao Wang, etc. A thickness-shear quartz resonator force
sensor with dual-mode temperature compensation, IEEE Sensors
Journal. 2003, 3 (4): 490-96.
[16]. Zheyao Wang, etc, Force-frequency coefficient of symmetrical
incomplete circular quartz crystal resonator, IEEE Trans. on
Ultrasononics, Ferroelectrics, and Frequency Control, 2001,
48(5), 1471-79.
[17]. Zheyao Wang, etc, An off-center load insensitive digital
quartz resonator force sensor based on energy trapping effect,
IEE Proceeding Science Measurement Technology, 2001, 148(5),
215-220.
[18]. Zheyao Wang, etc, A temperature insensitive quartz resonator
force sensor, Measurement Science and Technology, 2000, 11(11),
1565-69.
Address:
Wang Zheyao, Institute of Microelectronics,
Tsinghua University, Beijing 100084, China.Tel.010－62789151-322;Fax:010－62771130;
E-MAIL: z.wang@mail.tsinghua.edu.cn
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